aBeam Technologies:


Our products help optimize top-level semiconductor processes and nanofabrication

aBeam Technologies offers a wide variety of products to improve semiconductor manufacturing and nanofabrication. Our software helps simulate and optimize nanolithography, metrology, mask-making, and defect inspection as well as design and optimize semiconductor equipment. The company also sells photomasks and SEM functionality extension tools, and provides nanofabrication services.

Top-Level Masks

Our software optimizes electron beam lithography: feature linearity, shot noise, heating, and charging placement error. Other products optimize chrome etch and metrology for masks. [more...]

Photomasks

We offer low-priced, high quality photolitography masks with critical dimentions down to 1µm. Masks from 4" to 32" in size can be manufactured... [more...]

Metrology

Our software optimizes and calibrates CD-SEM, automatically analyses SEM images, and simulates optical scatterometry. [more...]

Electron Beam Lithography

Our products include simulation tools to understand and optimize electron interaction with materials, electron scattering, charging, heating, energy deposition. [more...]

Nanofabrication

We undertake micro/nano-fabrication projects involving a variety of techniques.We develop products in quantities ranging from a prototype to pilot production in the shortest time. [more...]

Dry Etch

Our software simulates dynamics of etch profile, including trenching, footing, dispersion, microloading. The software can also handle complex processes such a double patterning, MEMS etch. [more...]

Test Chips

The company manufactures custom test chips. We also carry a standard Beametr chip, used to measure an electron beam spot size. [more...]

SEM Functionality Enhancement Tools

Convert your Scanning Electron Microscope into a nanofabrication tool with an advanced pattern generator and add a high accuracy stage, and beam blanker. [more...]