aBeam Technologies:

Our products help optimize top-level semiconductor processes and nanofabrication

RnD 100 award

aBeam Technologies offers a wide variety of products to improve semiconductor manufacturing and nanofabrication. Our software aids in the simulation and optimization of nanolithography, metrology, mask-making, and defect inspection, as well as in the design and optimization of semiconductor equipment. We also sell photomasks and SEM functionality extension tools, and provide nanofabrication services.

Top level maskmaking

Top-Level Masks

Our software optimizes electron beam lithography, including feature linearity, shot noise, heating, and charging placement error. Other products optimize chrome etch and metrology for masks. [more...]



We offer low-priced, high quality photolitography masks with critical dimensions down to 1µm. Masks from 4" to 32" in size can be manufactured... [more...]



Our software optimizes and calibrates CD-SEM, automatically analyses SEM images, and simulates optical scatterometry. [more...]

Electron Beam Lithography

Electron Beam Lithography

Our products include simulation tools to understand and optimize electron interactions with materials, electron scattering, charging, heating, energy deposition, etc. [more...]



We undertake micro/nano-fabrication projects involving a variety of techniques. We develop products in quantities ranging from a prototype to pilot production in the shortest time possible. [more...]

Dry etch

Dry Etch

Our software simulates the dynamics of etch profiles, including trenching, footing, dispersion, and microloading. The software can also handle complex processes such a double patterning, MEMS etch, etc. [more...]

Top level masks

Test Chips

The company manufactures custom test chips. We also carry a standard Beametr chip, used to measure the electron beam spot size. [more...]

Xenos pattern generator

SEM Functionality Enhancement Tools

Convert your Scanning Electron Microscope into a nanofabrication tool with an advanced pattern generator and add a high accuracy stage and beam blanker. [more...]