About Abeamtech

Abeam Technologies is a company with expertise in microelectronic technology, software development, optics, and electronics. We develop simulation software used in maskmaking and microelectronic industry and are also involved in a variety of projects.

Products

These products are commercially available:

BEAMETR is a technique for operator independent measurement of electron-beam size. The product includes fabricated nano-pattern and software. The operator scans the pattern; the software reads the image and automatically determines the beam size.
CHARIOT: advanced Monte Carlo software to predict image formation in scanning electron microscopy (SEM) and e-beam defect inspection. It also predicts absorbed dose in EBL and other electron beam technologies.
TEMPTATION (Temperature Simulation) software: temperature rise in electron beam lithography (EBL) and its influence on variation of critical dimensions (CD).
TRAVIT: software to simulate plasma etch and wet etch. This is the only software on dry etch in maskmaking; it can also be applied to wafer etch. The software simulates etch profile, CDs, and CD-variation for patterns and processes, including microloading effect.
GenISys data preparation and modeling software allows for fast layout viewing, access, and processing of layout data. It was designed for easy integration with inspection equipment and DFM software.
XeDraw and XPG-2 (XENOS) pattern generators: Convert your SEM into a nanolithography tool! Get a speed of writing up to 50 MHz. The hardware comes with data preparation software and may include a beam blanker and a precision stage.

More about products

Projects

The company is involved in a variety of projects in microelectronic and telecom industries. Examples of completed and on-going projects are.

Evaluation of electron scattering and temperature rise under electron beam
Development of a software prototype
Design and fabrication of novel microoptical elements
Conceptual design of an e-beam column; optimization of an e-beam process
Design and fabrication of high-speed electronic boards (10 GHz)

Company

Abeam Technologies has its headquarters in California, USA, representative offices in Europe, Japan and Korea, and a group of software developers and mathematicians in Russia. Check the contact page for more information.