myCD: References

J. Hwu, S. Babin, P. Yushmanov,
SEM metrology on bit patterned media nanoimprint template: issues and improvements,
Proc. SPIE v.8324, 76380R (2012)

Sergey Babin, Sergey Borisov, Christophe Peroz, Peter Yushmanov,
Challenges of SEM metrology at sub-10nm linewidth,
Proc. SPIE v.8324, 83240T (2012)

S. Babin, K. Bay, J. Hwu,
Application of analytic scanning electron microscopy to critical dimensions metrology at nanometer scale,
J. Vac. Sci. Technol. B28 (6) C6H1 (2010)

S. Babin; K. Bay; M. Machin,
Model-based analysis of SEM images to automatically extract linewidth, edge roughness, and wall angle,
Proc. SPIE v.7628, 76380R (2010)