S. Babin; L. Doskolovich; Y. Ishibashi; A. Ivanchikov; N. Kazanskiy; I. Kadomin; T. Mikami; Y. Yamazaki,
SCATT: software to model scatterometry using the rigorous electromagnetic theory,
Proc. SPIE 7272 (2009) 72723X
S. Babin; L. Doskolovich; E. Kadomina; I. Kadomin; S. Volotovskiy,
Restoring pattern CD and cross-section using scatterometry: various approaches,
Proc. SPIE 7272 (2009) 727243