SCATT: simulation of scatterometry

SCATT screenshot

See references.

SCATT is a software tool used to simulate light scattering on microelectronic patterns. The software is based on the rigorous coupled wave analysis (RCWA) physical model.

The software is independent on any equipment vendor. It can be used to

  • Independently evaluate any existing or new scatterometry techniques
  • Find sensitivities of optical schemes to variations of the pattern
  • Determine the optimum set-up to provide the best sensitivity for the desired pattern

The software utilizes a user friendly 3D graphical user interface. The input parameters are:

  • materials and their thicknesses: dielectrics, semiconductors, metals
  • a description of the 3D geometry of the pattern
  • the optical constants of the materials
  • the light source: wavelength, incident angle, azimuth angle, polarization

The output of the software is the intensity of light in the requested transmitted or/and reflected diffraction orders.