DISPLACE screenshot

DISPLACE software models charging and displacement of the electron beam due to charging effects on the target's surface. The exposure of the resist layer to the charged beam causes an injection of holes and electrons into the layer. DISPLACE uses advanced physical models to describe the dynamics of surface charging and beam deflection. While the physics behind DISPLACE is quite complicated, the interface is simple and intuitive.

Pattern density
Electron beam placement error on second pass
Pattern density map
Placement error on the second pass