CHARIOT: References

Sergey Babin, Sergey Borisov, Hidemitsu Hakii, Yasushi Nishiyama, Isao Yonekura,
CD-Metrology of EUV masks in the presence of charging: measurement and simulation,
Proc. SPIE v 8441 (2012) 844108

S. Babin, S Borisov, G. Kwon, C. H. Lee, J. H. Oh, D. Y. Mun, H. W. Yoo,
CD-SEM and e-beam defect inspection of high-aspect ratio contact holes: measurement and simulation of precharge,
Proc. SPIE v.8324 (2012) 832428

Yasushi Nishiyama, Hidemitsu Hakii, Isao Yonekura, Keishi Tanaka, Yasutaka Kikuchi,
Influence of the charging effect on the precision of measuring EUV mask features,
Proc. SPIE v.7971 (2011) 79710C

Bengt A. Nilsson,
Experimental evaluation method of point spread functions used for proximity effects correction in electron beam lithography,
J. Vac. Sci. Technol. B 29, 06F311 (2011)

S. Babin, S. Borisov, H. Ito, A. Ivanchikov, M. Suzuki,
Simulation of scanning electron microscope images taking into account local and global electromagnetic fields,
J. Vac. Sci. Technol. B 28, C6C41 (2010)

M. Suzuki; S. Borisov; S. Babin; H. Ito,
Optimizing the detector configuration for SEM topographic contrast by using a Monte Carlo simulation,
Proc. SPIE v.7729 (2010) 772910

S. Babin; S. Borisov; H. Ito; A. Ivanchikov; D. Matison; V. Militsin; M. Suzuki
Comprehensive simulation of SEM images taking into account local and global electromagnetic fields,
Proc. SPIE v.7729 (2010) 77290W

M. Kadowaki; A. Hamaguchi; H. Abe; Y. Yamazaki; S. Borisov; A. Ivanchikov; S. Babin,
Investigation of factors causing difference between simulation and real SEM image,
Proc. SPIE v.7272 (2009) 727231

H. Abe, S. Babin, S. Borisov, A. Hamaguchi, A. Ivanchikov, M. Kadowaki, Y. Yamazaki,
Time dependence of SEM signal due to charging: measurements and simulation using Monte-Carlo software,
Proc. SPIE v 7272 (2009) 727248

H. Abe, S. Babin, S. Borisov, A. Hamaguchi, M. Kadowaki, Y. Miyano, Y. Yamazaki,
Contrast reversal effect in scanning electron microscopy due to charging,
J. Vac. Sci. Technol. B 27, 1039 (2009)

S. Babin, S. Borisov, A. Ivanchikov,
Modeling of charge and discharge in scanning electron microscopy,
Proc. SPIE v 7378 (2009) 737818

S. Babin, S. Borisov, A. Ivanchikov, I. Ruzavin,
CHARIOT: Software tool for modeling SEM signal and e-beam lithography,
Physics Procedia, 1, 2008 p. 305-313

H. Abe, S. Babin, S. Borisov, A. Hamaguchi, M. Kadowaki, Y. Miyano, Y. Yamazaki,
Experiment and simulation of charging effects in SEM,
Proc. SPIE, v. 6922 (2008) 692219

S. Babin, S. Borisov, A. Ivanchikov, I. Ruzavin,
Calibration of CD-SEM: moving from relative to absolute measurements,
Proc. SPIE, v. 6922, 2008 "Advanced Lithography 69222M

S. Babin, S. Borisov, A. Ivanchikov, I. Ruzavin,
Modeling of linewidth measurement in scanning electron microscopes using advanced Monte Carlo software,
JVST B6, 2006, p. 3121-3124

S. Babin, S. Borisov, A. Ivanchikov, I. Ruzavin
Modeling of Linewidth Measurement in SEMs Using Advanced Monte Carlo Software,
Proc. SPIE, v. 6152, 2006, 1519

S.Babin, S. Borisov, E.Cheremukhin, E.Grachev, V.Korol, L.Ocola
Software tool for advanced Monte Carlo simulation of electron scattering in EBL and SEM: CHARIOT,
Proc. SPIE, v.5037, 2003, p.583