BEAMETR: References

C. Peroz, S. Babin, M. Machin, E. Anderson, S. Cabrini, S. Dhuey, B. Harteneck,
Automatic measurement of electron beam size by beam metrology technique using 20?nm test pattern,
J. Vac. Sci. Technol. B 27, 3220 (2009)

S. Babin, C. Peroz, S. Cabrini, S. Dhuey, and B. Harteneck,
Fabrication of 20 nm patterns for automatic measurement of electron beam size using BEAMETR technique,
Microelectronic Engineering, 86 (2009), pp. 524-528


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S. Babin, M. Gaevski, D. Joy, M. Machin, A. Martynov,
Automatic measurement of electron-beam diameter and astigmatism: BEAMETR,
Physics Procedia, 1, p. 113-118 (2008)

S. Babin, M. Gaevski, D. Joy, M. Machin, A. Martynov,
Technique to automatically measure electron-beam diameter and astigmatism: BEAMETR,
JVST B6, p. 2956-2959 (2006)